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Open Access

Peer-reviewed

Research Article

The Intrinsic Resolution Limit in the Atomic Force Microscope: Implications for Heights of Nano-Scale Features

  • Sergio Santos,

    Affiliation School of Physics and Astronomy, University of Leeds, Leeds, United Kingdom

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  • Victor Barcons,

    Affiliation Departament de Disseny i Programació de Sistemes Electrònics, UPC - Universitat Politècnica de Catalunya, Manresa, Spain

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  • Hugo K. Christenson,

    Affiliation School of Physics and Astronomy, University of Leeds, Leeds, United Kingdom

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  • Josep Font,

    Affiliation Departament de Disseny i Programació de Sistemes Electrònics, UPC - Universitat Politècnica de Catalunya, Manresa, Spain

    ⨯
  • Neil H. Thomson

    n.h.thomson@leeds.ac.uk

    Affiliations School of Physics and Astronomy, University of Leeds, Leeds, United Kingdom, Department of Oral Biology, Leeds Dental Institute, University of Leeds, Leeds, United Kingdom

    ⨯

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